Title:
プラズマ発生装置及びプラズマ発生装置の制御方法
Document Type and Number:
Japanese Patent JP2011522357
Kind Code:
A
Abstract:
A plasma generator having a housing surrounding an ionization chamber, at least one working-fluid supply line leading into the ionization chamber, the ionization chamber having at least one outlet opening, at least one electric coil arrangement which surrounds at least one area of the ionization chamber, the coil arrangement being electrically connected with a high-frequency alternating-current source (AC) which is constructed such that it applies a high-frequency electric alternating current to at least one coil of the coil arrangement, is wherein a further current source (DC) is provided which is constructed such that it applies a direct voltage or an alternating voltage of a frequency lower than that of the voltage supplied by the high-frequency alternating current source (AC) to at least one coil of the coil arrangement.
Inventors:
Cadorno Deer, Werner
Kill in gel, liner
Kukies, Ralph
Lighter hans
Mueller, Johann
Schulte, Georg
Kill in gel, liner
Kukies, Ralph
Lighter hans
Mueller, Johann
Schulte, Georg
Application Number:
JP2011507789A
Publication Date:
July 28, 2011
Filing Date:
April 29, 2009
Export Citation:
Assignee:
Stork Fokker AESP BV
International Classes:
H05H1/54; F03H1/00; H01J27/16; H05H1/46
Domestic Patent References:
| JP2001159387A | 2001-06-12 | |||
| JPS6193534A | 1986-05-12 |
Foreign References:
| WO2008009898A1 | 2008-01-24 | |||
| US20040036032A1 | 2004-02-26 |
Attorney, Agent or Firm:
Hisako Ishido
Eiichi Yamaguchi
Eiichi Yamaguchi