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Title:
A conveyance arm, a conveying machine, and a transportation method
Document Type and Number:
Japanese Patent JP6186124
Kind Code:
B2
Abstract:
A transport arm including a holding unit that holds a substrate by vacuum adsorption. The holding unit has an air discharge port and an adsorption member formed so as to surround the air discharge port. The adsorption member is a squeeze packing.

Inventors:
Yoshihiro Inao
Kotone Rin
Akihiko Nakamura
Application Number:
JP2012273989A
Publication Date:
August 23, 2017
Filing Date:
December 14, 2012
Export Citation:
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Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
B65G49/07; H01L21/677
Domestic Patent References:
JP2012023174A
JP2011187566A
JP1132365U
JP2011253918A
JP6345262A
JP2006024683A
JP2000243814A
JP2001284436A
JP200821824A
Foreign References:
WO2009005027A1
Attorney, Agent or Firm:
Harakenzo world patent & trademark