A conveyance arm, a conveying machine, and a transportation method

Title:

A conveyance arm, a conveying machine, and a transportation method

Document Type and Number:

Japanese Patent JP6186124

Kind Code:

B2

Abstract:

A transport arm including a holding unit that holds a substrate by vacuum adsorption. The holding unit has an air discharge port and an adsorption member formed so as to surround the air discharge port. The adsorption member is a squeeze packing.

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Inventors:

Yoshihiro Inao
Kotone Rin
Akihiko Nakamura

Application Number:

JP2012273989A

Publication Date:

August 23, 2017

Filing Date:

December 14, 2012

Export Citation:

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Assignee:

Tokyo Ohka Kogyo Co., Ltd.

International Classes:

B65G49/07; H01L21/677

Domestic Patent References:

JP2012023174A
JP2011187566A
JP1132365U
JP2011253918A
JP6345262A
JP2006024683A
JP2000243814A
JP2001284436A
JP200821824A

Foreign References:

WO2009005027A1

Attorney, Agent or Firm:

Harakenzo world patent & trademark

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