Title:
TRANSPORTER, TRANSPORT DEVICE, AND SCRIBING SYSTEM
Document Type and Number:
Japanese Patent JP2018093071
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a transporter capable of smoothly cleaning the top surface of a table with a simple structure, a transport device including the transporter, and a scribing system provided with the transport device.SOLUTION: A transporter 300 holds a substrate 10 and transports the substrate from a first table 110 to a second table 410. The transporter 300 includes a first cleaning unit 240 that is disposed behind the transport direction of the substrate 10 and comes into contact with the upper surface of the first table 110 in a step of transporting the substrate 10 from the first table 110 to the second table 410, and cleans the upper surface of the first table 110. The first cleaning unit 240 includes a brush 241 as a cleaning tool, and the brush 241 moves while being in contact with the upper surface of the first table 110 to clean the upper surface of the first table 110.SELECTED DRAWING: Figure 1
Inventors:
NISHIO JINKO
TAKAMATSU IKUYOSHI
TAKAMATSU IKUYOSHI
Application Number:
JP2016235604A
Publication Date:
June 14, 2018
Filing Date:
December 05, 2016
Export Citation:
Assignee:
MITSUBOSHI DIAMOND IND CO LTD
International Classes:
H01L21/677; B28D5/00; B28D7/02; B65G49/06; G02F1/13; G02F1/1333; H01L21/301; H01L21/683
Domestic Patent References:
| JPH0556928U | 1993-07-30 | |||
| JP2005033120A | 2005-02-03 | |||
| JPH0616436U | 1994-03-04 |
Foreign References:
| WO2016159062A1 | 2016-10-06 |
Attorney, Agent or Firm:
Masamasa Shibano
Makoto Ohashi
Makoto Ohashi