Title:
シート基板の搬送装置
Document Type and Number:
Japanese Patent JP6551562
Kind Code:
B2
Abstract:
A cylindrical-member-position detection device is provided with: a second drum member (22); a plurality of scale increments (GP) that are disposed annularly along the direction of the rotation of the second drum member (22), rotate around a second central axis (AX2) together with the second drum member (22), and are for measuring positional variation of the second drum member (22) in the circumferential direction; an encoder head (EN4), which is for reading the scale increments (GP); and an encoder head (EN5), which is disposed in a different position than encoder head (EN4) and is for reading the scale increments (GP). Further, the cylindrical-member-position detection device corrects error in the scale increments (GP) on the basis of the value read by encoder head (EN4) and the value read by encoder head (EN5).
Inventors:
Masakazu Hori
Yoshiaki Kitou
Tomoya Suzuki
Tomoyuki Watanabe
Yousuke Hayashida
Masaki Kato
Yoshiaki Kitou
Tomoya Suzuki
Tomoyuki Watanabe
Yousuke Hayashida
Masaki Kato
Application Number:
JP2018037938A
Publication Date:
July 31, 2019
Filing Date:
March 02, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01D5/244; B65H20/02; B65H23/18; B65H43/00; G01D5/245; G03F7/20; G03F7/24; G03F9/00; H01L21/68
Domestic Patent References:
| JP2013200463A | ||||
| JP2012207923A | ||||
| JP2000258186A | ||||
| JP2014102444A | ||||
| JP2003262518A | ||||
| JP2008145299A | ||||
| JP200764771A |
Attorney, Agent or Firm:
Sakai International Patent Office