Title:
A conveying machine, a transportation method, an exposure device, and a device manufacturing method
Document Type and Number:
Japanese Patent JP6191721
Kind Code:
B2
Abstract:
Disclosed is a transfer apparatus which is provided with: a first supporting section (3), which supplies a gas to one surface of a substrate, and which can float and support the substrate by means of the gas; a second supporting section (400), which can support said surface of the substrate; a drive section (402), which moves the first supporting section and/or the second supporting section, and which arranges the first and the second supporting sections in the first direction by having the supporting sections close to or in contact with each other; and a transfer section, which moves the substrate supported by the first supporting section or the second supporting section to the other supporting section along the first direction, said first supporting section and second supporting section being arranged by the drive section.
Inventors:
Asako Kaneshiro
Yasuyuki Ushijima
Tetsuji Hanasaki
Yasuyuki Ushijima
Tetsuji Hanasaki
Application Number:
JP2016077555A
Publication Date:
September 06, 2017
Filing Date:
April 07, 2016
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; B65G49/06; B65G51/03; H01L21/677
Domestic Patent References:
| JP2009026783A | ||||
| JP2005244155A | ||||
| JP2006036471A | ||||
| JP2010027739A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Tadashi Takahashi
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