A cooperation operation device and a method

Japanese Patent JP6280309

B2

PROBLEM TO BE SOLVED: To realize energy saving in a multiloop control system which includes a main control system containing a plurality of systems and a sub control system containing only one system.SOLUTION: A cooperative operation device includes main control parts 1-1 to 1-n which calculate operation amount and output it to a corresponding actuator of a main control system, an operation amount enlarging part 2 which generates an operation amount system variable, which is a variable of an object to be adjusted in relation to the operation amount from the operation amount, normalizing parts 3-1 to 3-m which calculate a difference between the operation amount system variable and an operation amount system set value representing an equilibrium point which is a desired value in a set state of the operation amount system variable, to be normalized with a predetermined factor for providing a normalized operation amount, a selector 4 which synthesizes the normalized operation amount by performing weighing calculation with the normalized operation amount, and an operation amount adjustment control part 5 which, with a synthesized operation amount outputted from the selector 4 as a controlled amount input, calculates an adjustment operation amount by control calculation, for outputting it to an actuator of a sub control system.

JPH075903	ROBUST CONTROLLER
JP2013114297	DRIVE SYSTEM AND DRIVING METHOD, AND EXPOSURE DEVICE AND EXPOSING METHOD

Masato Tanaka
Miura Mayumi

JP2013086285A

February 14, 2018

April 17, 2013

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Azbil Co., Ltd.

G05B11/32; F24F3/044; F24F11/70

JP2014206838A
JP9126523A

Masaki Yamakawa
Shigeki Yamakawa

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