To provide a method capable of easily manufacturing a dielectric thin film having few cracks, stable quality, and an excellent close contacting property with a substrate, at low cost.
At a mixing process, a thin film synthesizing liquid is prepared by dissolving barium nitrate, fluorotitanium ammonium, and boric acid in distilled water, and titrating the above liquid by concentrated nitric acid so as to become pH 1 to 2. Next, a platinum-coated slide glass is made to stationarily float on the thin film synthesizing liquid for 2 hours as a thin-film making process. Afterwards, the slide glass is taken out from the thin film synthesizing liquid, cleaned by the distilled water, and dried by leaving it in the atmosphere for 48 hours.
COPYRIGHT: (C)2005,JPO&NCIPI
Yoshitake Masuda
Kunihito Kawamoto
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