Title:
A current measurement device and an ion current measurement system
Document Type and Number:
Japanese Patent JP6275455
Kind Code:
B2
Inventors:
Naoki Takahashi
Toru Okuno
Yoshikazu Matsumoto
Norimasa Seto
Toru Okuno
Yoshikazu Matsumoto
Norimasa Seto
Application Number:
JP2013238126A
Publication Date:
February 07, 2018
Filing Date:
November 18, 2013
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01R19/00; G01L21/30
Domestic Patent References:
| JP8035904A | ||||
| JP5134048A | ||||
| JP2003302520A | ||||
| JP7036348U | ||||
| JP2008282661A | ||||
| JP59006608A | ||||
| JP2008107203A | ||||
| JP2011257426A |
Foreign References:
| WO2011132365A1 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda
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