Title:
切削装置
Document Type and Number:
Japanese Patent JP7416600
Kind Code:
B2
Abstract:
An issue is to provide a cutting apparatus capable of suppressing a leakage of mist from a processing chamber while suppressing the clogging of a blade cover. To solve the issue, the cutting apparatus includes: a spindle on which a cutting blade is mounted; a blade cover covering the cutting blade; and a cutting unit having a nozzle for supplying cutting water. The blade cover includes: a duct receiving mist of the cutting water scattered by the rotation of the cutting blade from an inlet, and guiding the same to an outlet which is away from the inlet; and a gas-liquid separation part installed in the duct. The gas-liquid separation part includes: a collision surface with which the mist collides; and a water current part collecting liquid dropped from the collision surface. The water current part is extended to the outlet of the duct, and the mist and the gas are exhausted from the outlet through a water surface of the water current part.
More Like This:
Inventors:
Terashi Kentaro
Seo Joon Young
Seo Joon Young
Application Number:
JP2019193785A
Publication Date:
January 17, 2024
Filing Date:
October 24, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B55/06; B24B27/06; H01L21/301
Domestic Patent References:
| JP2011014670A | ||||
| JP2006237206A | ||||
| JP4267107A |
Attorney, Agent or Firm:
Sakai International Patent Office