Title:
切削装置
Document Type and Number:
Japanese Patent JP7458807
Kind Code:
B2
Abstract:
To provide a cutting device which can accurately detect breakage of a cutting blade during cutting.SOLUTION: A cutting device 1 includes a cutting blade 21 which cuts a workpiece 200 by rotation, a holding table 10 which holds the workpiece 200, and a shower nozzle 25 which supplies cutting water 40 to the cutting blade 21. A breakage state detection part 50 includes a light emitting element 52 and light receiving element 53 which are arranged oppositely with a tip of a cutting edge 212 of the cutting blade 21 interposed therebetween, and detects a breakage state of the cutting blade 21 on the basis of a light receiving amount of the light receiving element 53. The breakage state detection part 50 is arranged on a flow channel of the cutting water 40 supplied from the shower nozzle 25 to the cutting edge 212 of the cutting blade 21, and the cutting water 40 fills between a pair of mounting pieces 51 as a space opposite to the light emitting element 52 and the light receiving element 53.SELECTED DRAWING: Figure 6
Inventors:
Tomoaki Endo
Application Number:
JP2020019976A
Publication Date:
April 01, 2024
Filing Date:
February 07, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B27/06; B23Q11/00; B23Q17/09; B23Q17/24; B24B49/12; B24B55/02; H01L21/301
Domestic Patent References:
| JP2010114251A | ||||
| JP2019181612A | ||||
| JP2011110631A |
Attorney, Agent or Firm:
Sakai International Patent Office
Previous Patent: Image processing device and image processing method
Next Patent: Process estimation system, process data estimation method and program
Next Patent: Process estimation system, process data estimation method and program