CUTTING METHOD FOR WORK PIECE

Japanese Patent JP2017168575

A

PROBLEM TO BE SOLVED: To provide a cutting method for a work piece, whereby a cutting position can accurately be aligned.SOLUTION: A cutting method for a cutting device comprises: a chuck table; cutting means that cuts a work piece with a cutting blade fixed to a spindle; moving means that moves the chuck table and the cutting means relative to each other in X and Y directions orthogonal to each other; imaging means having an optical system with a reference line formed thereon; and control means. The cutting method comprises: a dressing step in which the cutting blade is dressed at a first number of spindle rotations; a grooving step in which a positioning groove is formed by cutting a dressing board along one or more lines at a second number of spindle rotations before or after the dressing step; a reference distance registration step in which a distance between a positioning groove and a reference line is registered; a cutting-position setting step in which a cutting position is set by aligning the reference line to a dividing line on a work piece; and a cutting step in which the work piece is cut at the second number of spindle rotations.SELECTED DRAWING: Figure 2

NORIZUMI DAIGO

JP2016051222A

September 21, 2017

March 15, 2016

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DISCO ABRASIVE SYSTEMS LTD

H01L21/301; B24B27/06

JP2011009652A	2011-01-13
JP2011083840A	2011-04-28
JP2011079112A	2011-04-21
JPH11260763A	1999-09-24
JP2011016175A	2011-01-27
JP2007331059A	2007-12-27
JP2007203429A	2007-08-16

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