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Title:
環状アセタール化合物、高分子化合物、レジスト材料、及びパターン形成方法
Document Type and Number:
Japanese Patent JP4206656
Kind Code:
B2
Inventors:
Mutsuko Nakajima
Seiichiro Tachibana
Takeshi Watanabe
Tsuyoshi Kanao
Koji Hasegawa
Tsunehiro Nishi
Jun Hatakeyama
Application Number:
JP2001295282A
Publication Date:
January 14, 2009
Filing Date:
September 27, 2001
Export Citation:
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Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C07D317/24; G03F7/039; C07D319/06; C08F32/00; C08F32/08; C08G61/08; H01L21/027
Domestic Patent References:
JP2000186118A
JP60091350A
JP10182537A
JP2000239436A
JP59202209A
Attorney, Agent or Firm:
Takashi Kojima
Yuko Nishikawa



 
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