A defect inspection device and a defect inspection method

Title:

A defect inspection device and a defect inspection method

Document Type and Number:

Japanese Patent JP6035124

Kind Code:

B2

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Inventors:

Tetsuo Takahashi

Application Number:

JP2012259729A

Publication Date:

November 30, 2016

Filing Date:

November 28, 2012

Export Citation:

Assignee:

MEC Corporation

International Classes:

G01N21/892; G01N21/898

Domestic Patent References:

Attorney, Agent or Firm:

Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Suzuki Mitsuyoshi
Yasuhiko Murayama

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