Title:
A defect inspection device and a defect inspection method
Document Type and Number:
Japanese Patent JP6168383
Kind Code:
B2
Abstract:
An apparatus for detecting a defect of an object may include a light emitter configured to emit straight polarized lights having different polarized directions, a spatial filter having openings through which the straight polarized lights selectively pass, an optical member configured to condense the straight polarized lights, which pass through the openings, on the object, and a light detector configured to detect lights reflected from the object. Thus, the defect may be accurately detected in a short time.
Inventors:
Akio Ishikawa
Mitsuhiro Togashi
Numata Mitsunori
Mitsuhiro Togashi
Numata Mitsunori
Application Number:
JP2012286202A
Publication Date:
July 26, 2017
Filing Date:
December 27, 2012
Export Citation:
Assignee:
Samsung Electronics Co.,Ltd.
International Classes:
G01N21/956
Domestic Patent References:
| JP2003149159A | ||||
| JP60124833A | ||||
| JP7201723A | ||||
| JP11512569A | ||||
| JP2006145305A | ||||
| JP2012026733A | ||||
| JP2011106965A |
Foreign References:
| US20030011760 |
Attorney, Agent or Firm:
IPD International Patent Business Corporation
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