Title:
The design and control of multi-temperature micro oven for MEMS devices
Document Type and Number:
Japanese Patent JP5956997
Kind Code:
B2
Inventors:
Satya Kiran N Munaga
Frankie Kator
Frankie Kator
Application Number:
JP2013533190A
Publication Date:
July 27, 2016
Filing Date:
October 11, 2011
Export Citation:
Assignee:
IMEC
Katholieke Universiteit Leuven
Katholieke Universiteit Leuven
International Classes:
H03B5/30; B81C99/00; H03L1/02
Domestic Patent References:
| JP2000183649A | ||||
| JP2009200888A | ||||
| JP2010213102A | ||||
| JP2003069422A | ||||
| JP2009065601A |
Foreign References:
| WO2010023883A1 | ||||
| US20110133798 | ||||
| WO2010052683A2 |
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Mikio Takeuchi
Mitsuo Tanaka
Mikio Takeuchi