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Title:
【発明の名称】センサの設計およびプロセス
Document Type and Number:
Japanese Patent JP2002539460
Kind Code:
A
Abstract:
An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

Inventors:
Selva Kumar, Argen
Goldberg, Howard, Dee.
Yu, Duri
Yip, Mature
Schmidt, Martin, A.
Marsh, James, Elle.
Fan, bin-phi
Simon, Philip
Application Number:
JP2000605219A
Publication Date:
November 19, 2002
Filing Date:
March 16, 2000
Export Citation:
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Assignee:
Input/Output, Incorporated
International Classes:
G01P21/00; G01D11/24; G01D18/00; G01H1/00; G01L27/00; G01P1/02; G01P15/08; G01P15/125; G01P15/13; G01V1/047; G01V1/053; G01V1/104; G01V1/18; G01V1/40; H01L21/60; H01L29/84; H05K5/00; G01N1/02; (IPC1-7): G01P15/125; G01H1/00; G01P15/08; H01L29/84
Domestic Patent References:
JP2825664B21998-11-18
JPH05172846A1993-07-13
Foreign References:
US5901939A1999-05-11
Attorney, Agent or Firm:
Masao Okabe (10 outside)