Title:
微細セラミックス構造体およびその製造方法
Document Type and Number:
Japanese Patent JP4395922
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent a fine ceramic structural body from collapsing and warping and control a permittivity by controlling relative permittivity of a fine ceramic structural body by removing a resin mold by using plasma etching. SOLUTION: A resin mold 6 is removed by plasma etching and at the same time, a relative permittivity of a prepared ceramic structural body is controlled. A relative permittivity can be controlled freely by changing at least either etching time or plasma power of plasma etching conditions. A composite piezoelectric material is obtained by making a fine ceramic structural body obtained in this way and resin composite. Furthermore, even when a fine ceramic structural body is prepared by processing such as cutting, grinding or laser abrasion instead of use of the resin mold 6, relative permittivity of a fine ceramic structural body can be controlled at an arbitrary value by performing plasma etching after processing.
Inventors:
Toshiyuki Numazawa
Application Number:
JP16376099A
Publication Date:
January 13, 2010
Filing Date:
June 10, 1999
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L41/39; B28B1/14; H01B19/00; H01L41/187; H01L41/333
Domestic Patent References:
| JP10510471A | ||||
| JP1050576A | ||||
| JP10261767A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Hidehiko Ito
Toshio Morita
Hidehiko Ito