Title:
【発明の名称】微細製作エラストマーバルブおよびポンプシステム
Document Type and Number:
Japanese Patent JP2003524738
Kind Code:
A
Abstract:
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
Inventors:
Anger, Mark A.
Butterfly, hop
Sausen, Todd A.
Stirrer, accelerator
Quake, Stephen Earl.
Butterfly, hop
Sausen, Todd A.
Stirrer, accelerator
Quake, Stephen Earl.
Application Number:
JP2001515901A
Publication Date:
August 19, 2003
Filing Date:
June 27, 2000
Export Citation:
Assignee:
California Institute of Technology
International Classes:
G03F7/20; B01L3/00; B81B1/00; B81B3/00; B81B7/00; B81C1/00; B81C99/00; C12Q1/68; F04B17/00; F04B35/04; F04B43/04; F15C5/00; F16K7/00; F16K17/02; F16K99/00; (IPC1-7): F16K17/02; B81B3/00; B81B7/00; F04B43/04; F16K7/00; G03F7/20
Attorney, Agent or Firm:
Shusaku Yamamoto