Title:
Detectors, electronic devices and manufacturing methods
Document Type and Number:
Japanese Patent JP6319426
Kind Code:
B2
Abstract:
A detector comprises a plurality of photoelectric converters to output an electrical signal corresponding to an incident light, and a plurality of filter circuits provided corresponding to each of the plurality of photoelectric converters or to each of a plurality of element groups respectively including a predetermined number of the photoelectric converters of the plurality of photoelectric converters, the plurality of filter circuits attenuating a signal having a predetermined frequency from the electrical signal output from the plurality of photoelectric converters. In the above-described detector, the plurality of photoelectric converters may be provided in a first substrate, and the plurality of filter circuits may be provided in a second substrate laminated on the first substrate.
Inventors:
Osamu Saruwatari
Shigeru Aoki
Kazuya Okamoto
Isao Sugaya
Okada Masashi
Hiroshi Oki
Shigeru Aoki
Kazuya Okamoto
Isao Sugaya
Okada Masashi
Hiroshi Oki
Application Number:
JP2016511963A
Publication Date:
May 09, 2018
Filing Date:
March 31, 2015
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H04N5/369; G01S7/4863; G01S7/4914; G01S17/894; H01L21/3205; H01L21/768; H01L23/522; H01L25/065; H01L25/07; H01L25/18; H01L27/146; H01L31/10; H04N5/374
Domestic Patent References:
| JP2000241134A | ||||
| JP2007228460A | ||||
| JP2012099580A | ||||
| JP2011192853A | ||||
| JP2012049547A |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation
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