Title:
A detector and a charged particle beam device
Document Type and Number:
Japanese Patent JP6228870
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a detector capable of achieving high detection sensitivity by effectively transferring light generated in a scintillator to a photodetector.SOLUTION: A detector 100 detects a scattered charged particle beam EBscattered by a sample with an irradiation of a charged particle beam and allowing a transmitting charged particle beam EBtransmitting through the sample to pass therethrough. The detector includes: a scintillator 10 provided with a first through hole 12 for passing the transmitting charged particle beam EBand converting the scattered charged particle beam EBinto light; a pipe section 20 allowing light generated in the scintillator 10 to enter through a first opening to be emitted through a second opening; a light guide 30 for guiding light emitted through the second opening; and a photo-detection section 40 for detecting light guided by the light guide 30. A second through hole 26 for passing the transmitting charged particle beam EBtherethrough is provided in the pipe section 20.
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Inventors:
Takeshi Kaneko
Application Number:
JP2014051170A
Publication Date:
November 08, 2017
Filing Date:
March 14, 2014
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/244; H01J37/28
Domestic Patent References:
| JP2013026152A | ||||
| JP1292282A | ||||
| JP52038880A |
Foreign References:
| US20120037802 |
Attorney, Agent or Firm:
Yukio Fuse
Mitsue Obuchi
Mitsue Obuchi