Title:
温度センサの較正のための装置
Document Type and Number:
Japanese Patent JP4628550
Kind Code:
B2
Abstract:
An apparatus for calibration of temperature sensors, comprising a cavity (2) for receiving a sensor (10) to be calibrated, a heat-transferring medium (5) for surrounding the sensor in the cavity, and a means for heating/cooling of the medium to a desired temperature. The cavity (2) receives at least one sensor-surrounding thin-walled calibrator body (3) which is made of a pliable material having a high thermal conductivity and which defines a volume (4) which is filled of a heat-transferring medium, the calibrator body (3) having an inner wall (8) defining at least a part of an inner opening (9) for receiving at least one sensor (10), and being arranged to be subjected to a pressure influence to bring the opening-defining wall (8) of the calibrator body into tight-fitting abutment against the sensor (10) or sensors.
More Like This:
| JPH0619065 | [Name of invention] Thermometer calibrator |
| WO/1999/002952 | APPARATUS FOR MEASURING THE TEMPERATURE OF WAFERS |
Inventors:
Brunrun, Ole Anal
Application Number:
JP2000615579A
Publication Date:
February 09, 2011
Filing Date:
April 28, 2000
Export Citation:
Assignee:
Brunrun, Ole Anal
International Classes:
G01K15/00
Domestic Patent References:
| JP10115562A | ||||
| JP8015056A | ||||
| JP63248450A |
Foreign References:
| WO1999004231A1 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Hidehiko Ito
Yutaka Horii
Morishita Hachiro
Toshio Morita
Yoshihei Nakamura
Hidehiko Ito
Yutaka Horii
Morishita Hachiro