Title:
ピース式またはバッチ式で超臨界または臨界近くの処理媒質により基材片を高圧処理するための装置
Document Type and Number:
Japanese Patent JP4958442
Kind Code:
B2
Abstract:
A device for treating pieces of a substrate at high pressure, piece by piece or in batches, with a treatment medium in the supercritical or near-critical state, comprising a first pressure chamber (2), a pipe system (5) for supplying and discharging the treatment medium, to and from the pressure chamber (2) under high pressure and an electric motor (7), which is fixed to the housing in the first pressure chamber or in a second pressure chamber coupled to the first pressure chamber under the high pressure, for driving an actuator to carry out a mechanical action in the treatment medium. The electric motor (7) is in this case open to the treatment medium and is disposed and designed to be accessible to the treatment medium, in such a manner that during the treatment of a substrate the treatment medium flows through and around the electric motor (7).
Inventors:
Pellikhan Humberto Clemens
Woolley Hert Feyer
Woolley Hert Feyer
Application Number:
JP2006005653A
Publication Date:
June 20, 2012
Filing Date:
January 13, 2006
Export Citation:
Assignee:
Stork Prints B.Fee.
International Classes:
F04B39/00; D06F43/08; F16C33/32; F16C33/44; F16C33/66; H02K3/44; H02K5/12; H02K5/173; H02K7/14
Domestic Patent References:
| JP2001012352A |
Foreign References:
| US6351973 | ||||
| US6412312 | ||||
| US6427479 | ||||
| US5563391 | ||||
| US20060125337 | ||||
| US3994805 | ||||
| US20050120491 |
Attorney, Agent or Firm:
Eiji Saegusa
Kakehi Yuro
Tachibana Kenji
Kakehi Yuro
Tachibana Kenji