A device and a method of aligning two plates in penetrated type baby square X-rays dispersion measurement

Title:

A device and a method of aligning two plates in penetrated type baby square X-rays dispersion measurement

Document Type and Number:

Japanese Patent JP6215282

Kind Code:

B2

Inventors:

Kure
Chen Nobumatsu
Lieutenant
Easy Yun Coral
What Shinka

Application Number:

JP2015212355A

Publication Date:

October 18, 2017

Filing Date:

October 28, 2015

Export Citation:

Assignee:

INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

International Classes:

G01B15/00; G01N23/201

Domestic Patent References:

Foreign References:

US20150117610

Attorney, Agent or Firm:

Takaki Nishijima
Disciple Maru Ken
Shinichiro Tanaka
Mitsuru Matsushita
Ichiro Kurasawa
Katsuomi Isogai

Previous Patent: A processed object conveying machine, a semiconductor manufacturing device, and a processed object t...

Next Patent: PLANT SUBSTRATE CONTAINING SOIL ACTIVATOR AND ITS ARRANGEMENT