Title:
特にマイクロシステムにおける、組み合わされた干渉及びイメージに基づく形状決定のための装置及び方法
Document Type and Number:
Japanese Patent JP5541916
Kind Code:
B2
Abstract:
The arrangement has a lens (8) determining an optical path to receive light coming from a device under test (9) and transferring to an image recording device (12). A beam splitter (2) is arranged together with a reflector (4) of a reference optical path (3), and is arranged in an optical path. An illumination device (1a) illuminates the device under test that is associated to the optical path to radiate the light to the reference optical path and the optical path. An illumination device (1b) illuminates the device under test whose light is kept away from the reference optical path. An independent claim is also included for a method for combined laminar detection of high value of a device under test.
Inventors:
シュテ fence Norbert
Lehmann Peter
Lehmann Peter
Application Number:
JP2009508215A
Publication Date:
July 09, 2014
Filing Date:
May 04, 2007
Export Citation:
Assignee:
Curl Marc Holding ゲーエムベーハー
International Classes:
G01B9/04; G01B11/02; G02B21/00
Attorney, Agent or Firm:
Fujita アキラ
Hideki Imai
Hideki Imai