Title:
A device and a method for the surveillance based on the spectrum of chemical machinery polish
Document Type and Number:
Japanese Patent JP6052906
Kind Code:
B2
Inventors:
Ben Wegnu, Dominique, Jay.
David, Jeffrey, Drew
Swedek, Bogdan
Lee, Harry, Cue.
Kalppier, Lakshmanan
David, Jeffrey, Drew
Swedek, Bogdan
Lee, Harry, Cue.
Kalppier, Lakshmanan
Application Number:
JP2014249936A
Publication Date:
December 27, 2016
Filing Date:
December 10, 2014
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B24B37/013; B24B37/26; B24B37/34; B24B49/04; B24B49/08; H01L21/304
Domestic Patent References:
| JP2005033012A | ||||
| JP2004343090A | ||||
| JP2003507199A | ||||
| JP2000254860A |
Foreign References:
| US20030181135 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation