Title:
粒子ビーム及び光を用いる顕微鏡で試料を観察する装置
Document Type and Number:
Japanese Patent JP5534646
Kind Code:
B2
Abstract:
The invention relates to an apparatus for observing a sample (1) with a TEM column and an optical high resolution scanning microscope (10). The sample position when observing the sample with the TEM column differs from the sample position when observing the sample with the optical microscope in that in the latter case the sample is tilted towards the light-optical microscope. By using an optical microscope of the scanning type, and preferably using monochromatic light, the lens elements (11) of the optical microscope facing the sample position can be sufficiently small to be positioned between the pole faces (8A, 8B) of the (magnetic) particle-optical objective lens (7). This is in contrast with the objective lens systems conventionally used in optical microscopes, which show a large diameter. Furthermore the optical microscope, or at least the parts (11) close to the sample, may be retractable so as to free space when imaging in TEM mode.
Inventors:
Alexandra Farrelifna Afronskaya
Hans Kasper Heritsen
Adrianis Johannes Ferkelai
Abraham Johannes Coster
Hans Kasper Heritsen
Adrianis Johannes Ferkelai
Abraham Johannes Coster
Application Number:
JP2008023533A
Publication Date:
July 02, 2014
Filing Date:
February 04, 2008
Export Citation:
Assignee:
FEI COMPANY
International Classes:
H01J37/26; G01Q60/22; G02B21/00; H01J37/20
Domestic Patent References:
| JP4071152A | ||||
| JP61104551A | ||||
| JP2003263969A | ||||
| JP2003282016A | ||||
| JP2000199854A | ||||
| JP2003121748A | ||||
| JP2000251819A | ||||
| JP51142343A | ||||
| JP2000208083A |
Attorney, Agent or Firm:
Tadahiko Ito
Shinsuke Onuki
Tadashige Ito
Shinsuke Onuki
Tadashige Ito
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