Title:
可動基板上に過渡熱プロファイル処理を提供するための装置
Document Type and Number:
Japanese Patent JP2013528768
Kind Code:
A
Abstract:
An apparatus for curing thin films is disclosed. The apparatus includes a computer control system, a conveyance system, a flashlamp controller, and a flashlamp. The curing apparatus also includes a high average power, low-inductance cable connected between the flashlamp controller and the flashlamp. The low-inductance cable is smaller in diameter and is more flexible than the prior art and includes at least one liquid cooling line and multiple forward and return path wires interleaved in a regular hexagonal closed packed configuration such that every wire is adjacent to at least one cooling line and at least one wire of opposite polarity.
Inventors:
Schroeder, Kurt A.
McCool, Stephen Sea.
Jackson, Douglas K.
McCool, Stephen Sea.
Jackson, Douglas K.
Application Number:
JP2013503973A
Publication Date:
July 11, 2013
Filing Date:
April 08, 2011
Export Citation:
Assignee:
NC Nano, LLC
International Classes:
F26B13/10; B05C9/14; F26B3/28; F26B23/04
Domestic Patent References:
| JP2009164201A | 2009-07-23 | |||
| JP2009277759A | 2009-11-26 | |||
| JPS63126579A | 1988-05-30 | |||
| JP2006255661A | 2006-09-28 | |||
| JP2008128567A | 2008-06-05 | |||
| JP2002536174A | 2002-10-29 |
Foreign References:
| US20100007285A1 | 2010-01-14 | |||
| US3732011A | 1973-05-08 | |||
| WO2009131490A2 | 2009-10-29 | |||
| US20090181184A1 | 2009-07-16 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita