Title:
平均自由行程を測定する装置および真空容器
Document Type and Number:
Japanese Patent JP5463361
Kind Code:
B2
Abstract:
The present invention provides a device for measuring a mean free path capable of measuring directly the mean free path of a charged particle, a vacuum gauge, and a method for measuring a mean free path. The device for measuring a mean free path according to one embodiment of the invention includes an ion source for generating an ion, a collector (24a) for detecting the number of first charged particles being charged particles having a first flight distance L1 that is a flight distance of zero or more from the ion source, and a collector (24b) for detecting the number of second charged particles having a second flight distance longer than the first flight distance. The control part of the device calculates the mean free path from a ratio between the numbers of the first and second charged particles.
Inventors:
Yoshiro Shiokawa
Megumi Nakamura
Strong
Megumi Nakamura
Strong
Application Number:
JP2011531877A
Publication Date:
April 09, 2014
Filing Date:
September 01, 2010
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
G01L21/32
Domestic Patent References:
| JP2001044108A | 2001-02-16 | |||
| JP2001165907A | 2001-06-22 | |||
| JP2001166100A | 2001-06-22 |
Foreign References:
| WO2008024825A2 | 2008-02-28 |
Other References:
JPN6013048427; 阪井英次: 放射線計測の理論と演習（上）基礎編 , 19931215, ｐａｇｅ．１６６-１７０, 現代工学社
Attorney, Agent or Firm:
Okabe
Koji Yoshizawa
Katsumi Miyama
Takashi Kawasaki
Koji Yoshizawa
Katsumi Miyama
Takashi Kawasaki