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Patent Searching and Data


Title:
真空計用ダイヤフラム装置
Document Type and Number:
Japanese Patent JP2009517633
Kind Code:
A
Abstract:
A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.

Inventors:
Björkman, Pell
Barufuri, Urs
Hanselman, Hans Jacob
Darris, Stanislav
Buest, martin
Application Number:
JP2008541564A
Publication Date:
April 30, 2009
Filing Date:
November 13, 2006
Export Citation:
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Assignee:
Inficon GmbH
International Classes:
G01L19/06; G01L21/00
Domestic Patent References:
JP2008527386A2008-07-24
JPS58101155U1983-07-09
JPS4858172U1973-07-24
JPH11173934A1999-07-02
Foreign References:
WO2004104543A12004-12-02
US1619444A1927-03-01
US2061949A1936-11-24
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa