Title:
ダイアフラム、流体制御装置、及びダイアフラムの製造方法
Document Type and Number:
Japanese Patent JP6602553
Kind Code:
B2
Abstract:
A diaphragm having chemical resistance is disclosed. The diaphragm includes a membrane portion and a connection portion which enables connection of the membrane portion to another member. The membrane portion is formed of a first material having chemical resistance. The connection portion is formed of a second material whose main material is the same as that of the first material. The membrane portion and the connection portion are directly bonded together.
Inventors:
Yoshiki Masaki
Miyashita Michio
Higashi Shoji
Takayuki Kumagai
Miyashita Michio
Higashi Shoji
Takayuki Kumagai
Application Number:
JP2015093352A
Publication Date:
November 06, 2019
Filing Date:
April 30, 2015
Export Citation:
Assignee:
CKD Corporation
International Classes:
F16J3/02; F04B43/02
Domestic Patent References:
| JP2013541666A | ||||
| JP8189470A | ||||
| JP8210256A | ||||
| JP59122787A | ||||
| JP2009222189A | ||||
| JP2011247407A | ||||
| JP61160666A |
Attorney, Agent or Firm:
Tsuyoshi Yamada
Hiroshi Matsuda
Hiroshi Matsuda