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Title:
ダイヤフラム部材
Document Type and Number:
Japanese Patent JP7148182
Kind Code:
B2
Abstract:
To provide a diaphragm member which is constructed as a diaphragm structure applying laser welding to a connection between an auxiliary shaft and the center of a diaphragm even if the diaphragm is as thin as a film, by selecting a film-like PFA such as to secure flexibility and long life, as a formation material for the diaphragm such as to suppress a few nm of dust to the minimum, and utilizing the adaptable fluorine-contained resin auxiliary shaft in consideration of easy assembly with other members.SOLUTION: A diaphragm member 200 includes a film-like diaphragm 200a formed of PFA, and an auxiliary shaft 200c laser-welded to the center of the diaphragm 200a.SELECTED DRAWING: Figure 1

Inventors:
Hironobu Matsuzawa
Nobuyuki Fujikawa
Application Number:
JP2021122131A
Publication Date:
October 05, 2022
Filing Date:
July 27, 2021
Export Citation:
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Assignee:
Advance Electric Industry Co., Ltd.
International Classes:
F16J3/02
Domestic Patent References:
JP2016211618A
JP56167957A
JP2011220422A
Attorney, Agent or Firm:
間瀬 ▲けい▼一郎