Title:
A dicing apparatus and a dicing method
Document Type and Number:
Japanese Patent JP6010827
Kind Code:
B2
Inventors:
Yuusuke Kaneshiro
Jyunichi Ito
Jyunichi Ito
Application Number:
JP2012108759A
Publication Date:
October 19, 2016
Filing Date:
May 10, 2012
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
H01L21/301
Domestic Patent References:
| JP2005053203A | ||||
| JP2003068677A | ||||
| JP9320994A | ||||
| JP2113907A | ||||
| JP59223282A |
Attorney, Agent or Firm:
Kenzo Matsuura
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