Title:
DIFFERENTIAL PRESSURE DETECTION ELEMENT, FLOW RATE MEASURING DEVICE, AND METHOD OF MANUFACTURING DIFFERENTIAL PRESSURE DETECTION ELEMENT
Document Type and Number:
Japanese Patent JP2017161401
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a differential pressure detection element which decreases offset voltage by reducing the initial warpage amount of a cantilever part in an offset state.SOLUTION: A differential pressure detection element includes: a supporting substrate 11 which has an opening 111; a cantilever part 12 cantilevered by a supporting substrate 11 so as to project out to the opening 111; a diffusion layer 13 which includes piezoresistance parts 131 and 132 provided at a fixed end 121 of the cantilever part 12; a pair of wiring parts 16 and 17 electrically connected to the diffusion layer 13; a first insulation layer 14 which covers the diffusion layer 13; and a second insulation layer 15 laminated on the first insulation layer 14. A linear expansion coefficient of the first insulation layer 14 is relatively small to a linear expansion coefficient of material configuring the cantilever part 12, and a linear expansion coefficient of the second insulation layer 15 is relatively large to a linear expansion coefficient of the first insulation layer 14.SELECTED DRAWING: Figure 3
Inventors:
ARAI HAYATO
SHIOIRI TATSUYA
TAKAYAMA NAOKI
SHIOIRI TATSUYA
TAKAYAMA NAOKI
Application Number:
JP2016047102A
Publication Date:
September 14, 2017
Filing Date:
March 10, 2016
Export Citation:
Assignee:
FUJIKURA LTD
International Classes:
G01L13/02; B81B3/00; B81C1/00; G01F1/36; G01L9/00; H01L29/84
Attorney, Agent or Firm:
Eternal patent business corporation
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