Title:
DIFFERENTIAL PRESSURE DETECTION ELEMENT AND FLOW RATE MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2018063224
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a differential pressure detection element which can suppress temporal change of an offset voltage.SOLUTION: A differential pressure detection element 10 includes: a supporting part 11; a cantilever part 12 supported by the supporting part 11, the cantilever part elastically deforming according to a differential pressure; a diffusion layer 13 in a fixed end 121 of the cantilever part 12, the diffusion layer having piezoresistance parts 131 and 132; a first insulating layer 14 covering at least the diffusion layer 13; and a second insulating layer 15 stacked on the first insulating layer 14, the second insulating layer 15 covering end surfaces 143 and 144 of the first insulating layer 14 in a region near at least the diffusion layer 13.SELECTED DRAWING: Figure 3
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Inventors:
SHIOIRI TATSUYA
Application Number:
JP2016202744A
Publication Date:
April 19, 2018
Filing Date:
October 14, 2016
Export Citation:
Assignee:
FUJIKURA LTD
International Classes:
G01L9/00; B81B3/00; G01F1/00; G01F1/28; G01F1/38; G01L13/06; H01L29/84
Domestic Patent References:
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Foreign References:
| US8429977B2 | 2013-04-30 |
Attorney, Agent or Firm:
Eternal patent business corporation