Title:
DIFFERENTIAL PRESSURE SENSOR FULL OVERPRESSURE PROTECTION DEVICE
Document Type and Number:
Japanese Patent JP2017211375
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a pressure sensor die assembly for a differential pressure sensor comprising a base substrate including a first overpressure stop structure on a first surface and a diaphragm structure coupled to the first surface.SOLUTION: The diaphragm structure comprises a first side with a cavity section that includes a first cavity and a second cavity surrounding the first cavity, and a second side opposite from the first side. A pressure sensing diaphragm portion is defined by the first cavity and is located over the first overpressure stop structure. An overpressure diaphragm portion is defined by the second cavity. A top cap coupled to the second side of the diaphragm structure includes a second overpressure stop structure. The overpressure stop structures are each sized to support substantially all of a strained area of the pressure sensing diaphragm portion at an increasing overpressure on the first or second side of the diaphragm structure.SELECTED DRAWING: Figure 1B
Inventors:
BROWN GREGORY C
Application Number:
JP2017094380A
Publication Date:
November 30, 2017
Filing Date:
May 11, 2017
Export Citation:
Assignee:
HONEYWELL INT INC
International Classes:
G01L13/06; G01L9/00; G01L19/06; H01L41/113
Attorney, Agent or Firm:
Shinjiro Ono
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Shigeo Takeuchi
Osamu Yamamoto
Toru Miyamae
Motoharu Nakanishi
Shigeo Takeuchi