Title:
【発明の名称】液体ベーパライザ装置と該装置の使用方法
Document Type and Number:
Japanese Patent JP2002505377
Kind Code:
A
Abstract:
The present invention provides for improved liquid vaporizer systems and methods for their use. Vaporizer systems of the present invention are likely to be particularly useful for the vaporization of liquids having a relatively low vapor pressure, such as TDMAT. In one preferred embodiment, a liquid vaporizer system (10) includes a vaporizer unit (16) having first and second inlets (50 and 60) and an outlet (62). The vaporizer system further includes a vessel (22) having an inlet (70) and an outlet (72), whereby the vessel inlet is operably connected to the vaporizer outlet. The vessel contains a plurality of passages (78) which operably connect the vessel inlet and the vessel outlet. In this manner, liquids and/or gases flowing into the vaporizer unit through either or both of its two inlets, exit the vaporizer unit outlet and enter the vessel inlet. Liquids and/or gases pass through the plurality of passages and exit the vessel outlet. In this manner, heating vaporizer unit and vessel to desired temperatures results in the vaporization of the liquid, such as liquid TDMAT.
Inventors:
Houston, Joel, M.
Chen, Hufa
Chen, Hufa
Application Number:
JP2000533604A
Publication Date:
February 19, 2002
Filing Date:
February 11, 1999
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
B01J7/00; C23C16/448; H01L21/205; (IPC1-7): C23C16/448; B01J7/00; H01L21/205
Attorney, Agent or Firm:
Yoshiki Hasegawa (1 person outside)