Title:
A discharge inspection device and a substrate processing device
Document Type and Number:
Japanese Patent JP6105985
Kind Code:
B2
Inventors:
Toru Furukawa
Hiroshi Sano
Hiroshi Sano
Application Number:
JP2013052192A
Publication Date:
March 29, 2017
Filing Date:
March 14, 2013
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; B05C5/00; B05C11/00; B05C11/08
Domestic Patent References:
| JP2011233571A | ||||
| JP2012106148A |
Attorney, Agent or Firm:
Masahiro Matsusaka
Tsutomu Tanaka
Masamichi Ida
Tsutomu Tanaka
Masamichi Ida