Title:
A display, a display module, and electronic equipment
Document Type and Number:
Japanese Patent JP6190015
Kind Code:
B2
Abstract:
A manufacture process of a thin film transistor mounted on an EL display device is simplified. A thin film transistor is manufactured by stacking a first conductive film, an insulating film, a semiconductor film, an impurity semiconductor film, and a second conductive film; forming a first resist mask over the stacked films; performing first etching to form a thin-film stack body; performing second etching by side etching is conducted on the thin-film stack body to form a gate electrode layer; and forming a source and drain electrode layer and the like with use of a second resist mask. An EL display device is manufactured using the thin film transistor.
Inventors:
Hidekazu Miyairi
Shigeki Komori
Toshiyuki Isa
Atsushi Umezaki
Shigeki Komori
Toshiyuki Isa
Atsushi Umezaki
Application Number:
JP2016150972A
Publication Date:
August 30, 2017
Filing Date:
August 01, 2016
Export Citation:
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
International Classes:
G09F9/30; H01L51/50; H05B33/26; H05B44/00
Domestic Patent References:
| JP2001202035A | ||||
| JP2003179069A | ||||
| JP2001109405A | ||||
| JP2003223119A | ||||
| JP2001174844A | ||||
| JP2008009372A | ||||
| JP9160076A | ||||
| JP11133455A | ||||
| JP9033951A | ||||
| JP2001188240A | ||||
| JP64084669A | ||||
| JP2009276758A | ||||
| JP2009158941A | ||||
| JP2009231828A |
Foreign References:
| US20050219433 |