Title:
処理方法及び処理装置
Document Type and Number:
Japanese Patent JP5083173
Kind Code:
B2
Inventors:
Satoshi Wakabayashi
Shinya Okabe
Seishi Murakami
Morishima Masato
Kunihiro Tada
Shinya Okabe
Seishi Murakami
Morishima Masato
Kunihiro Tada
Application Number:
JP2008280443A
Publication Date:
November 28, 2012
Filing Date:
October 30, 2008
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/458; C23C16/34; C23C16/44; H01L21/285
Domestic Patent References:
| JP2002512307A | ||||
| JP2001192828A | ||||
| JP2001144033A | ||||
| JP10321558A | ||||
| JP2000277459A |
Attorney, Agent or Firm:
Akihiro Asai