Title:
ドレッサーボード
Document Type and Number:
Japanese Patent JP7430450
Kind Code:
B2
Abstract:
The present invention provides a dresser board capable of preventing scattering of particles. The dresser board for dressing a cutting blade of the present invention comprises: a dressing layer comprising abrasive grains fixed by a binding material and having a first surface and a second surface; and a scattering prevention film formed on a first surface side and a second surface side of the dressing layer and configured to prevent scattering of the particles from the dressing layer.
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Inventors:
Wataru Matsumoto
Application Number:
JP2020028977A
Publication Date:
February 13, 2024
Filing Date:
February 25, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B53/12; B24B27/06; B24B53/02; H01L21/301
Domestic Patent References:
| JP11188626A | ||||
| JP2010214523A | ||||
| JP2018118358A | ||||
| JP10058306A |
Foreign References:
| US20090090066 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano