Title:
θZ駆動装置およびステージ装置
Document Type and Number:
Japanese Patent JP5387760
Kind Code:
B2
Abstract:
In this θZ drive apparatus, at least three coil portions are arranged to be capable of driving a stage in a direction Z, a direction θx which is a rotation direction employing a direction X in a horizontal plane as a center line of rotation, and a direction θy which is a rotation direction employing a direction Y in the horizontal plane orthogonal to the direction X as a center line of rotation.
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Inventors:
Yoshiaki Kubota
Toru Kayama
Yoichiro Dan
Toshiyuki Kono
Akihito Toyota
Toru Kayama
Yoichiro Dan
Toshiyuki Kono
Akihito Toyota
Application Number:
JP2012509277A
Publication Date:
January 15, 2014
Filing Date:
December 09, 2010
Export Citation:
Assignee:
Yaskawa Electric Co., Ltd.
International Classes:
H01L21/027; H01L21/68
Domestic Patent References:
| JPH1174186A | 1999-03-16 | |||
| JPH11251409A | 1999-09-17 | |||
| JPS63138730A | 1988-06-10 | |||
| JP2000150623A | 2000-05-30 | |||
| JPH11297798A | 1999-10-29 | |||
| JP2006222345A | 2006-08-24 |
Attorney, Agent or Firm:
Hirokazu Miyazono