Title:
A drive, an exposure device, and a manufacturing method of an article
Document Type and Number:
Japanese Patent JP6092523
Kind Code:
B2
Abstract:
The present invention provides a driving apparatus including an axis member supported on a base, and a movable member movable along the axis member, comprising a plurality of plate members each including a through-hole through which the axis member penetrates and surrounding the axis member, wherein the plurality of plate members are located apart from each other in a moving direction of the movable member.
Inventors:
Akira Morohashi
Nobu Shigeru Korenaga
Nobu Shigeru Korenaga
Application Number:
JP2012093396A
Publication Date:
March 08, 2017
Filing Date:
April 16, 2012
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; H01L21/68
Domestic Patent References:
| JP62184277A | ||||
| JP9303517A | ||||
| JP10067429A | ||||
| JP11260890A | ||||
| JP2007315515A | ||||
| JP2007232130A | ||||
| JP2011190927A | ||||
| JP2011247404A | ||||
| JP2012017843A |
Foreign References:
| WO2011074170A1 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
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