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Title:
DRIVE DEVICE, LITHOGRAPHY DEVICE, COOLING METHOD, AND METHOD FOR MANUFACTURING ARTICLE
Document Type and Number:
Japanese Patent JP2017156465
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a drive device, a lithography device, and a cooling method capable of reducing temperature fluctuation of a coil.SOLUTION: A drive device 200 according to the present invention comprises: an electromagnetic actuator having a magnet 8 and a coil 10, and driving an object 6 by flowing of a current into the coil 10; an accommodating means for accommodating a first refrigerant 24 for cooling the coil 10 by evaporation from a liquid state, and the coil immersed in the liquid-state first refrigerant; condensation means 71 and 80 for condensing the gas-state first refrigerant 24; and a detection means 38 for detecting changes of the states of the first refrigerant 24. The condensation means 71 and 80 include adjustment means 32, 86, 88 for adjusting the amount of condensation of the first refrigerant 24, on the basis of the detection result of the detection means 38.SELECTED DRAWING: Figure 2

Inventors:
NOMOTO MAKOTO
Application Number:
JP2016038128A
Publication Date:
September 07, 2017
Filing Date:
February 29, 2016
Export Citation:
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Assignee:
CANON KK
International Classes:
G03F7/20; H01L21/68; H02K9/19
Domestic Patent References:
JP2013105815A2013-05-30
JP2002291219A2002-10-04
JP2004031673A2004-01-29
JPS51141463U1976-11-15
JP2003133211A2003-05-09
JP2005142283A2005-06-02
JPS63173716A1988-07-18
JP2003214733A2003-07-30
JPS58145855A1983-08-31
JP2001168564A2001-06-22
JPH05243438A1993-09-21
JP2011096983A2011-05-12
JP2002078314A2002-03-15
JP2005064391A2005-03-10
JP2015191959A2015-11-02
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa



 
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