Title:
A drive, a robot device, and a drive method
Document Type and Number:
Japanese Patent JP5966320
Kind Code:
B2
More Like This:
Inventors:
Akimitsu Ebihara
Application Number:
JP2011242138A
Publication Date:
August 10, 2016
Filing Date:
November 04, 2011
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
B25J19/06; B25J19/00
Domestic Patent References:
JP10249777A | ||||
JP9212203A | ||||
JP2003127079A | ||||
JP2005219133A | ||||
JP2007319954A | ||||
JP2284900A | ||||
JP2002052485A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi