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Title:
A drive, a robot device, and a drive method
Document Type and Number:
Japanese Patent JP5966320
Kind Code:
B2
Inventors:
Akimitsu Ebihara
Application Number:
JP2011242138A
Publication Date:
August 10, 2016
Filing Date:
November 04, 2011
Export Citation:
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Assignee:
NIKON CORPORATION
International Classes:
B25J19/06; B25J19/00
Domestic Patent References:
JP10249777A
JP9212203A
JP2003127079A
JP2005219133A
JP2007319954A
JP2284900A
JP2002052485A
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi



 
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