Title:
DROPLET DISCHARGE DEVICE AND DISCHARGE INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2018008231
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To adjust a discharge state appropriately based on a result of imaging functional liquid droplets landed on a medium for inspection without performing adjustment by type of a functional liquid in a droplet discharge device for discharging droplets onto a workpiece.SOLUTION: A droplet discharge device 1 includes a nozzle head 24 for discharging droplets of functional liquid onto a workpiece, a discharge inspection unit 50 for receiving the inspection discharge from the nozzle had 24 on the surface having liquid repellency of an inspection film 52, a discharge inspection camera 31 for imaging the droplets inspection-discharged on the surface of the inspection film 52, and an electricity removal unit 80 for removing electricity on the surface having liquid repellency of the inspection film 52. The electricity on the surface of the inspection film 52 is removed by the electricity removal unit 80 before the inspection-discharging of the droplets.SELECTED DRAWING: Figure 1
Inventors:
IMADA YU
HAYASHI TERUYUKI
OSHIMA KIYOMI
HAYASHI TERUYUKI
OSHIMA KIYOMI
Application Number:
JP2016139504A
Publication Date:
January 18, 2018
Filing Date:
July 14, 2016
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
B05C11/00; B05C5/00; B05C11/10; B05D1/26; B05D3/00; B05D3/14
Domestic Patent References:
| JP2010227788A | 2010-10-14 | |||
| JPH11281810A | 1999-10-15 | |||
| JP2004223507A | 2004-08-12 | |||
| JP2010204413A | 2010-09-16 | |||
| JP2016077966A | 2016-05-16 | |||
| JP2014180851A | 2014-09-29 | |||
| JP2015033805A | 2015-02-19 | |||
| JP2007190698A | 2007-08-02 |
Foreign References:
| KR20160083420A | 2016-07-12 |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Naoki Ogita
Miaki Kametani
Koji Hagiwara
Naoki Ogita