Title:
ドライエッチング方法
Document Type and Number:
Japanese Patent JP3154128
Kind Code:
B2
Inventors:
柳田 敏治
Application Number:
JP14815191A
Publication Date:
April 09, 2001
Filing Date:
May 24, 1991
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L21/302; C07C21/18; C07C23/02; H01L21/3065; (IPC1-7): H01L21/3065
Attorney, Agent or Firm:
小池 晃 （外３名）