Title:
ELASTIC DEFORMABLE PAD, SUCTION PAD UNIT, VACUUM CHUCK DEVICE AND MACHINE TOOL
Document Type and Number:
Japanese Patent JP2019166597
Kind Code:
A
Abstract:
To provide an elastic deformable pad that can be easily suppressed from deteriorating in adsorption force, an adsorption pad unit, a vacuum chuck device and a machine tool.SOLUTION: An elastic deformable pad 60 is positioned at a side at which a work-piece W, one example of objects to be placed, is placed with respect to a porous pad 21 with air permeability having a plurality of air holes so as to pass fluid therethrough. The elastic deformable pad 60 comprises a plurality of tube parts 61, formed in tube shape along a thickness direction (a Z-direction) of the porous pad 21 and arranged along a placement surface 20a on which the work-piece W is placed, which are formed of elastic materials that are pressed by the work-piece W to be elastically deformed when the work-piece W is adsorbed by the porous pad 21 through the elastic deformable pad 60.SELECTED DRAWING: Figure 5
Inventors:
TAKADA ATSUSHI
TAKADA HISATOSHI
OHASHI KYOSUKE
TAKADA HISATOSHI
OHASHI KYOSUKE
Application Number:
JP2018055694A
Publication Date:
October 03, 2019
Filing Date:
March 23, 2018
Export Citation:
Assignee:
NANOTEMU KK
International Classes:
B24B41/06; B23Q3/08; H01L21/683
Attorney, Agent or Firm:
Kimura Mitsuru
Yuta Kobayashi
Kenro Shirai
Taiji Morikawa
Yuta Kobayashi
Kenro Shirai
Taiji Morikawa