Title:
静電容量センサ及びその製造方法
Document Type and Number:
Japanese Patent JP4535046
Kind Code:
B2
Abstract:
A method for manufacturing a capacitance sensor comprises the steps of (a) depositing a film to be a diaphragm forming a moving electrode, (b) heating the film to be the diaphragm to a first temperature, and (c) depositing a film to be a plate forming a fixed electrode opposing to the moving electrode. Stresses of the diaphragm and the plate of the capacitance sensor are optimized.
Inventors:
Suzuki Minjin
Application Number:
JP2006224978A
Publication Date:
September 01, 2010
Filing Date:
August 22, 2006
Export Citation:
Assignee:
Yamaha Corporation
International Classes:
G01L9/00; H01G7/00; H01L29/84; H04R19/04; H04R31/00
Domestic Patent References:
| JP2002345089A | ||||
| JP2003031820A | ||||
| JP2002518913A | ||||
| JP8247878A | ||||
| JP2002026007A | ||||
| JP2003199196A | ||||
| JP2004343377A | ||||
| JP7007161A | ||||
| JP2004356707A | ||||
| JP8102544A | ||||
| JP11233794A |
Attorney, Agent or Firm:
Dai Yoshida
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