Title:
The electric capacity type transducer cell before collapse with a ring-shaped collapse field
Document Type and Number:
Japanese Patent JP6265906
Kind Code:
B2
Abstract:
The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12) comprising a first electrode (16), a membrane (14) comprising a second electrode (18), wherein the cell has an outer region (22) where the membrane (14) is mounted to the substrate (12) and an inner region (20) inside or surrounded by the outer region (22), wherein the membrane (14) is collapsed to the substrate (12) in a first collapsed annular-shaped region (24) located within the inner region (20).
Inventors:
Robinson Andrew Lee
Frasel Yong Dafras
Frasel Yong Dafras
Application Number:
JP2014541778A
Publication Date:
January 24, 2018
Filing Date:
November 05, 2012
Export Citation:
Assignee:
KONINKLIJKE PHILIPS N.V.
International Classes:
H04R19/00; A61B8/00; H04R31/00
Domestic Patent References:
| JP2011522444A | ||||
| JP2009100459A | ||||
| JP2004536455A | ||||
| JP2007074628A | ||||
| JP2006020313A |
Foreign References:
| WO2010097729A1 |
Attorney, Agent or Firm:
Fueda Shusen