Title:
電気機械変換装置及びその作製方法
Document Type and Number:
Japanese Patent JP5875243
Kind Code:
B2
Abstract:
A method of producing an electromechanical transducer (2) includes forming an insulating film on a first electrode (13), forming a sacrificial layer on the insulating film, forming a first membrane (16) on the sacrificial layer, forming a second electrode (4) on the first membrane (16), forming an etching-hole (19) in the first membrane (16) and removing the sacrificial layer through the etching-hole (19), and forming a second membrane (18) on the second electrode (4), and sealing the etching-hole (19). Forming the second membrane (18) and sealing the etching-hole (19) are performed in one operation.
Inventors:
Kazutoshi Torashima
Takahiro Akiyama
Toshio Tomiyoshi
Takahiro Akiyama
Toshio Tomiyoshi
Application Number:
JP2011084674A
Publication Date:
March 02, 2016
Filing Date:
April 06, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
H04R31/00; H04R19/00
Domestic Patent References:
| JP2010263444A | ||||
| JP2005271191A | ||||
| JP2007235937A | ||||
| JP2007528153A | ||||
| JP2010154734A | ||||
| JP2007527285A | ||||
| JP2009296569A | ||||
| JP64013773A |
Foreign References:
| US20100123366 | ||||
| US20100283354 | ||||
| US20050200241 | ||||
| US20100327380 | ||||
| US20050151442 | ||||
| US20070176701 | ||||
| US20050177045 | ||||
| US20110026367 |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa
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